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 Model 87 UltraStableTM
316 SS Pressure Sensor High Performance, Small Profile 0-100 mV Output Temperature Compensated Absolute and Sealed Gage
Hydraulic Controls Process Control Robotics Oceanography Refrigeration/Compressors Pressure Transmitters
DESCRIPTION
This is a micro machined piezoresistive silicon pressure sensor. It is designed for OEM applications where compatibility with corrosive media must be maintained. The sensor chip is mounted on a TO style header, which is resistance welded to a 316 stainless steel package, sealing a small volume of silicone oil between the diaphragm and the sensor chip. The ISO pressure housing utilizes the oil column to couple the piezoresisteve sensor to the isolation diaphragm. A thickfilm ceramic compensation board with laser trimmed resistors, and additional gain set resistor to normalize pressure sensitivity are an integral part of the sensor package. A variety of threaded process fittings are available. Fittings include standards like 1/4 and 1/8 NPT as well as custom process fittings. Electrical options include cable and connector.
FEATURES
Weldable, Optional Process Fittings 0.25 Pressure Non-linearity 1.0% Temperature Performance 0.25 Interchangeable Span (provided by gain set resistor) Solid State Reliability Low Power
DIMENSIONS
STANDARD RANGES
Range 0 to 1000 0 to 3000 0 to 5000 psia psis


1-70
ISO - Wide Temperature Range
316 SS Pressure Sensor PERFORMANCE SPECIFICATIONS
Model 87 UltraStableTM
All parameters measured at 1.5mA drive and at 25C, after 10 second warm up, unless otherwise specified. Unless specifically indicated, only those parameters indicated as tested are verified on each part. Parameters are specified for the compensation version only.
PARAMETERS Full Scale Output Span Zero Offset Pressure Non Linearity Pressure Hysteresis Input and Output Resistance Temp. Error - Span Temp. Error - Zero Thermal Hysteresis - Span Thermal Hysteresis - Zero Supply Current Output Load Resistance Insulation Resistance (50 VDC) Compensation Operating Temperature Operating Temperature Range Storage Temperature Range Media - Pressure Port Media - Reference Port Weight Notes 1. All 3000 psi and 5000 psi parts are tested at 2500 psi. 2. 3. 4. Best fit straight line. Over temperature range -20C to +85C, % span, with respect to +25C. Load resistance to reduce measurement errors due to output loading. 0.5 5 50 -20C to +85C -40C to +125C -55C to +125C Liquids and Gases compatible with 316L Stainless Steel. Liquids and Gases. Compatible with Silicon, Pyrex, Gold, Fluorosilicone Rubber and 316L Stainless Steel. 11 g 7 2000 -0.75 -0.75 0.05 0.05 1.5 2.0 MIN 75 -1 -0.25 50 2750 4000 +0.75 +0.75 TYP 100 0 MAX 125 1 0.25 UNITS mV mV % Span V % Span % Span % Span % Span mA M M 4 5 6 6 6 3 3 3 3 2 NOTES 1
5. 6. 7.
Between case and sensing element. Maximum temperature range for product with standard cable and connector is -20C to +105C. Weight depends upon configuration (cable, connector, pressure fitting).
ORDERING INFORMATION
APPLICATION SCHEMATIC
CONNECTIONS
PAD NO. / CABLE 1 2 3 4 5 6 FUNCTION +OUT -EX +EX -OUT GAIN GAIN
April 2000
ISO - Wide Temperature Range
1-71


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